Dr. Bahram Azizollah Ganji Profile

Dr. Bahram Azizollah Ganji

at Babol Noshirvani Univ of Technology

SPIE Involvement:

Author

Publications (3)

SPIE Journal Paper | 13 May 2020

Design and modeling of a highly sensitive microelectromechanical system capacitive microphone

Sedighe Babaei Sedaghat, Bahram Azizollah Ganji

JM3, Vol. 19, Issue 02, 025001, (May 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.2.025001

KEYWORDS: Microelectromechanical systems, Mathematical modeling, Silicon, Capacitance, Crystals, Protactinium, Capacitors, Finite element methods, Systems modeling, Device simulation

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SPIE Journal Paper | 12 February 2018

Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer

Bahram Azizollah Ganji, Sedighe Babaei Sedaghat, Alberto Roncaglia, Luca Belsito, Reza Ansari

JM3, Vol. 17, Issue 01, 015002, (February 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.1.015002

KEYWORDS: Semiconducting wafers, Silicon, Microelectromechanical systems, Etching, Photomasks, Acoustics, Photoresist materials, Oxides, Dry etching, Wet etching

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SPIE Journal Paper | 1 April 2009

Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm

Bahram Ganji, Burhanuddin Majlis

JM3, Vol. 8, Issue 02, 021112, (April 2009) https://doi.org/10.1117/12.10.1117/1.3091941

KEYWORDS: Microelectromechanical systems, Aluminum, Acoustics, Etching, Capacitance, Finite element methods, Silicon, Scanning electron microscopy, Electrodes, Mechanical sensors

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