Dr. Zhimeng Wei Profile

Dr. Zhimeng Wei

Mr at National Univ of Defence Technology

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Proceedings Article | 20 August 2011 Paper

Light-scattering characterization of transparent substrates for laser-gyro application

Kaiyong Yang, Zhimeng Wei, Xingwu Long, Yun Zhao, Jianping Liu

Proceedings Volume 8192, 81920F (2011) https://doi.org/10.1117/12.897127

KEYWORDS: Light scattering, Scattering, Laser scattering, Mirrors, Charge-coupled devices, Scatter measurement, Objectives, Integrated optics, Surface roughness, Optical testing

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To produce high-quality, low-scattering optical interference coatings for laser-gyro application, substrates with extremely smooth surfaces are required for deposition. For successful production of qualified mirrors, characterization of substrates before coating is essential. Light scattering has been used for decades to characterize the surface roughness of optical components. Its application in characterizing the surfaces of transparent substrates, commonly used for deposition, is difficult due to the low scattering of high-quality substrates and the scattering contribution of substrates' back surface and volume scattering. Light scattering characterization of transparent substrates for laser-gyro application has been studied in this paper. It has been found that collecting objective is more propitious to eliminate volume scattering and scattering from back surfaces of substrates than integrating sphere and more appropriate to characterize superpolished transparent surfaces of substrates for laser-gyro application. Collecting objective whose N.A. is 0.4 has been designed in ZEMAX. Careful analysis shows that scattering from back surfaces and volume scattering from points with axile distances to the front surface more than 1.5 millimeters can be eliminated completely. To solve the drift problem of PMT used for probing scattering light, specific structure of collecting system has been designed, so that scattering light and reflecting light can strike on the same PMT orderly. It has been found that the drift problem of PMT could be solved with this setting, so that the stability of the scattering measurement system over long time span could be improved greatly and its practicability in engineering has been ensured.

Proceedings Article | 13 October 2010 Paper

Three-position method for leveling optical surface automatically based on 2D PSD

Zhimeng Wei, Kaiyong Yang, Xingwu Long

Proceedings Volume 7656, 765657 (2010) https://doi.org/10.1117/12.864322

KEYWORDS: Statistical analysis, Error analysis, Reflection, Sensors, Optical testing, Integrated optics, Signal processing, Detector development, Scatter measurement, Defense technologies

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A new method for leveling optical surface automatically based on 2D Position Sensitive Detector (PSD) was developed and applied in Total Integrated Scatterometer for qualification of superpolished substrates. For light path in the method, incident laser beam is required to be reflected by the sample surface onto PSD, which provides light spot position on photosurface at resolution of 5 μm. Firstly, 2D motorized translation stages under the sample translate it along the two orthogonal translation axes by a distance, and PSD yields correspondingly three positions, from which the sample surface's attitude expressed as analytic equation and normal vector is derived. Secondly, 2D motorized goniometers between the sample and translation stages rotate orderly in each direction of translation axes by angles computed according to rotation transformation to make the sample surface's normal vector vertical. Finally flyback translation is performed to verify the spot on PSD photosurface yields no displacement and the sample surface is level. In the paper, formulas from three positions to the surface's analytic equation and rotation angles are deduced in detail. Performance and error analysis according to the scatterometer's actual dimension shows that the leveling system's adjustable range is ±1.7° and the resolution of two translation axes is separately 21" and 0.5°. Experiment results show that the three-position leveling method's precision is less than 0.1°.

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