Graphit-iC graphite-like carbon coatings were deposited on SDC90 cold work die steel by using an unbalanced magnetron sputtering technology. Effects of the temperature on microstructure and internal friction of the carbon coatings were characterized by Raman spectroscopy (Raman) and a low-frequency mechanical analyzer (LMA-1) testing system. The results indicate that the internal friction of the two-side deposited carbon coatings is small (2.17×10-4), being higher than one of the substrate (1.63×10-4), and increases with temperature. However, there is an internal friction peak at 250°C accompanied with partial sp3 transferred to sp2 and increasing the intensity ratio ID/IG. There is gradual graphitization tendency of the carbon coatings as temperatures increase from 25°C to 350 °C. This would be progressive transformation from amorphous to crystalline.
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