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Dr. Yusuke Hibi
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Publications (1)
Proceedings Article | 10 April 2024 Poster
Polymer sequencer to demystifying sequence–line-edge roughness correlation
Masanobu Naito, Yusuke Hibi
Proceedings Volume 12957, 1295727 (2024) https://doi.org/10.1117/12.3009962
KEYWORDS: Polymers, Copolymers, Line edge roughness, Polymerization, Binary data, Spatial resolution, Optical lithography, Mass spectrometry, Machine learning, Inhomogeneities
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