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Yunfei Li

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Proceedings Article | 13 November 2024 Paper

High-performance optical surfaces polishing technology and machine tools

Dongxu Wu, Baozhen Li, Yunfei Li, Yunfeng Peng, Lin Sun

Proceedings Volume 13280, 1328008 (2024) https://doi.org/10.1117/12.3046052

KEYWORDS: Polishing, Optical surfaces, Mirrors, Magnetorheological finishing, Surface finishing, Polishing equipment, Optics manufacturing, Manufacturing, Optical components

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High-performance optical surfaces are crucial in advanced optics as they ensure the performance and longevity of essential devices. Achieving high-performance optical surfaces involves strict contour control requirements and demanding machining accuracy standards. The capability to manufacture these surfaces depends on advancements in manufacturing processes and machine tool equipment for difficult-to-machine optical materials. In the manufacturing process of high-performance optical surfaces, polishing technology and machine tools play a central role. This includes critical polishing technologies and related machine tools such as CCOS small grinding head polishing, bonnet polishing, and magnetorheological finishing. These technologies have unique polishing mechanisms, processing characteristics, and deep academic and application backgrounds. The current status and progress of research by optical manufacturers and scholars and the associated problems and risks of different polishing techniques and equipment in processing high-performance optical mirrors are discussed. To meet the extreme manufacturing accuracy requirements of optical components in the future, technical challenges and development directions are pointed out. Developing new polishing machine tools and equipment is necessary to meet the ever-increasing precision requirements of optical surfaces. This will promote the development of high-performance optical surface manufacturing technology to achieve extreme precision, higher efficiency, and a more comprehensive range of applications.

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