This paper introduces the design of a three-degree-of-freedom parallel piezoelectric micro-platform with simple and compact structure, large stroke and no coupling. Firstly, the driving unit of the micro-moving platform is designed by using the flexible bridge amplifier mechanism of double-layer flexible thin plate, and the platform body of the micro-moving platform is designed based on the double-parallelogram flexible mechanism, and then a new configuration of the x-y-θz parallel piezoelectric micro-moving platform with large displacement stroke is designed. Finally, the static and dynamic performance of the platform is tested by finite element simulation. The results show that the developed platform performs well, and the platform along x, y and θz direction is 308.72μm, 404.72μm and 2.79mrad, and the natural frequencies are 101.76 Hz, 119.71 Hz, and 134.53 Hz, respectively.
A novel method for suppressing non-uniform reflection in differential confocal microimaging is proposed in this paper. The method is based on the differential confocal optical path and aims to eliminate the influence of non-uniform reflection perturbation on the surface contour imaging of highly stepped samples. This is achieved by dividing the squared difference between the pre-focus and post-focus signals of the differential confocal by the larger value of the squared pre-focus and post-focus signals. The effectiveness of the proposed method is demonstrated through theoretical analysis, simulation, and experimental verification. The results show that the method can successfully realize height imaging of height step samples. It is found that non-uniform reflection perturbation only affects the edge overshoot and position of the height profile imaging curve. This method can achieve high-precision, high-efficiency, and non-contact measurement of step samples with non-uniform reflection disturbances. This has significant implications for various applications requiring accurate surface contour imaging.
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