Ms. Yue Zhao Profile

Yue Zhao

at Huazhong Univ of Science and Technology

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 17 January 2005 Paper

Polymer microlens array integrated with imaging sensors by UV-molding technique

Jianjun Lai, Yue Zhao, Caijun Ke, Xinjian Yi, TianXu Zhang

Proceedings Volume 5644, (2005) https://doi.org/10.1117/12.571212

KEYWORDS: Microlens array, Polymers, Photoresist materials, Microlens, Polymeric sensors, Optical sensors, Fabrication, Silicon, Charge-coupled devices, Ultraviolet radiation

Read Abstract +

Proceedings Article | 30 December 2004 Paper

Fabrication of anisotropic structures with large aspect ratio and minimal roughness by using black silicon method

Yue Zhao, Jianjun Lai, Hong Zhou, Xinjian Yi

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.570968

KEYWORDS: Silicon, Etching, Reactive ion etching, Anisotropic etching, Semiconducting wafers, Plasmas, Anisotropy, Gases, Micro optics, Ions

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years