M-lines spectroscopy (MLS) is an accurate, to within 10-3-10-4, nondestructive technique for measuring optogeometric
parameters (refractive index and thickness) of thin planar step-index waveguide films. Two exciting polarizations can be
used and information about the film anisotropy derived. Usually, MLS uses only one wavelength, which may be
disadvantageous in some cases. We have developed an MLS setup that includes a set of lasers emitting in the range of
405 to 1550 nm to conduct multi-wavelength MLS (MWMLS). MWMLS offers an opportunity to obtain more detailed
optical information, e.g., index profiles and dispersion curves, especially important for sol-gel prepared waveguide thin
films that are relatively porous and whose structure depends on the annealing treatment. The paper presents a detailed
description of the MWMLS setup. By using sol-gel prepared waveguide thin films of Y2O3, HfO2:Eu3+, and TiO2, optical
measurements are exemplified. Proceeding from the measurements, the advantages and limitations of the method are
discussed.
YAG optical planar waveguide was elaborated through sol-gel method. Acetate-alkoxide (YAG-I) and 2-alkoxides (YAG-II) methods were used for the sol preparations. The as-deposited layers were characterized by Fourier Transform Infrared Spectroscopy (FTIR), X-ray diffraction (XRD), m-lines, spectroscopy (MLS) Rutherford Backscattering Spectroscopy (RBS) and waveguide Raman spectroscopy (WRS). No intermediate phases were observed for both synthesis routes. In comparison, (YAG-II) layers presented a better adherence than YAG-I to SiO2 substrate, a higher refractive index and allowed to form a pure phase of YAG at lower temperature and short heat duration (900°C for 10min). However, the interdiffusion of Al and Si ions were detected to influence the refractive index improvement by heat treatments. The propagation loss of the fabricated YAG thin films in amorphous phase can be as low as 1.5±0.3 dB/cm.
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