Electroabsorption modulator has been widely used in modern optical fiber communication system and analog RF link system. In this paper, the design of a high-performance EAM with low coupling loss, high saturation power and high speed was demonstrated, which include the waveguide, active core and electrodes. A novel EAM with large optical cavity (LOC) waveguide structure, intrastep quantum well (IQW) active core and traveling wave electrodes was presented and fabricated successfully. Our results show that the LOC waveguide effectively improved the optical profile of EAM and reduced the coupling loss. The obtained traveling wave EAM achieved 21dBm saturation power and 23GHz 3-dB bandwidth.
High performance InGaAsP/InGaAsP strained compensated multiple-quantum-well (MQW) electroabsorption
modulators (EAM) monolithically integrated with a DFB laser diode have been designed and realized by ultra low
metal-organic vapor phase epitaxy (MOVPE) based on a novel butt-joint scheme. The optimization thickness of upper
SCH layer for DFB and EAM was obtained of the proposed MQW structure of the EAM through numerical simulation
and experiment. The device containing 250μm DFB and 170μm EAM shows good material quality and exhibits a
threshold current of 17mA, an extinction ratio of higher than 30 dB and a very high modulation efficiency (12dB/V)
from 0V to 1V. By adopting a high-mesa ridge waveguide and buried polyimide, the capacitance of the modulator is
reduced to about 0.30 pF corresponding to a 3dB bandwidth more than 20GHz.
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