Dr. Yoshiyuki Kamata Profile

Dr. Yoshiyuki Kamata

at Toshiba Corp

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 26 March 2013 Paper

Orientation and position-controlled block copolymer nanolithography for bit-patterned media

R. Yamamoto, M. Kanamaru, K. Sugawara, N. Sasao, Y. Ootera, T. Okino, H. Hieda, N. Kihara, Y. Kamata, A. Kikitsu

Proceedings Volume 8680, 86801U (2013) https://doi.org/10.1117/12.2012654

KEYWORDS: Beam propagation method, Magnetism, Lithography, Carbon, Nanolithography, Photomasks, Reactive ion etching, Scanning electron microscopy, Servomechanisms, Directed self assembly

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Proceedings Article | 21 March 2012 Paper

Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media

Takeshi Okino, Takuya Shimada, Akiko Yuzawa, Ryosuke Yamamoto, Naoko Kihara, Yoshiyuki Kamata, Akira Kikitsu, Takashi Akahane, You Yin, Sumio Hosaka

Proceedings Volume 8323, 83230S (2012) https://doi.org/10.1117/12.916304

KEYWORDS: Magnetism, Beam propagation method, Scanning electron microscopy, Image analysis, Servomechanisms, Reactive ion etching, Electron beam lithography, Etching, Oxygen, Directed self assembly

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Proceedings Article | 2 April 2011 Paper

Nanoimprint process for 2.5Tb/in2 bit patterned media fabricated by self-assembling method

Yasuaki Ootera, Akiko Yuzawa, Takuya Shimada, Ryousuke Yamamoto, Yoshiyuki Kamata, Naoko Kihara, Akira Kikitsu

Proceedings Volume 7970, 79700K (2011) https://doi.org/10.1117/12.878936

KEYWORDS: Beam propagation method, Silicon, Etching, Servomechanisms, Nickel, Nanoimprint lithography, Magnetism, Photomasks, Ultraviolet radiation, Electroplating

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Proceedings Article | 26 May 2010 Paper

Fabrication of ridge-and-groove servo pattern consisting of self-assembled dots for high-density bit patterned media

Yoshiyuki Kamata, Akira Kikitsu, Naoko Kihara, Seiji Morita, Kaori Kimura, Haruhiko Izumi

Proceedings Volume 7748, 774809 (2010) https://doi.org/10.1117/12.863873

KEYWORDS: Servomechanisms, Beam propagation method, Magnetism, Head, Photoemission spectroscopy, Etching, Polymers, Scanning electron microscopy, Distortion, Interference (communication)

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