Yoshiaki Matsura
at Osaka Institute of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 December 2012 Paper
Hiroki Muraoka, Tomosumi Kamimura, Yuki Yamana, Yoshiaki Matsura, Hideo Horibe
Proceedings Volume 8530, 85301V (2012) https://doi.org/10.1117/12.977338
KEYWORDS: Silicon, Semiconducting wafers, Laser irradiation, Laser damage threshold, Laser induced damage, Near infrared, Visible radiation, Laser energy, Semiconductor lasers, Nd:YAG lasers

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