Dr. Yohan Kondo Profile

Dr. Yohan Kondo

at National Institute of Advanced Industrial Science

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Publications (2)

Proceedings Article | 21 August 2020 Presentation + Paper

Absolute flatness measurements by Fizeau interferometer and 3D scanning deflectometric profiler

Yohan Kondo, Youichi Bitou

Proceedings Volume 11492, 1149203 (2020) https://doi.org/10.1117/12.2570412

KEYWORDS: Autocollimators, Fizeau interferometers, Optical testing, 3D scanning, 3D metrology, Deflectometry, Calibration, Metrology, Interferometers

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Proceedings Article | 25 October 2016 Paper

λ/100 reference flat for commercially available Fizeau interferometer

Y. Kondo, Y. Bitou, Kazuhide Yamauchi

Proceedings Volume 9687, 968708 (2016) https://doi.org/10.1117/12.2242806

KEYWORDS: Fizeau interferometers, Finite element methods, Photography, Silicon, Measurement devices, Semiconducting wafers, Photomasks, Adhesives, Metrology, Geometrical optics

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