CONFERENCE PROCEEDINGS
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Yidan Lu
at SITP
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Publications (2)
Proceedings Article | 20 November 2014 Paper
Study of ICP-RIE etching on CdZnTe substrate
Pengxiao Xu, Hui Qiao, Ren Wang, Tianyi Lan, Shijia Liu, Nili Wang, Qin Zhou, Bin Xu, Xiujuan Liu, Yidan Lu, Li-wei Wang, Chao Chang, Kefeng Zhang, Xiangyang Li
Proceedings Volume 9300, 93000T (2014) https://doi.org/10.1117/12.2071045
KEYWORDS: Etching, Photoresist materials, Argon, Plasma, Gases, Optical microscopes, Lithography, Reactive ion etching, Mercury cadmium telluride, Infrared detectors
Proceedings Article | 2 September 2014 Paper
Properties of InGaN P-I-N ultraviolet detector
Yidan Lu, Yan Zhang, Xiang-yang Li
Proceedings Volume 9284, 92840P (2014) https://doi.org/10.1117/12.2073317
KEYWORDS: Indium gallium nitride, Annealing, Resistance, Ultraviolet detectors, Sensors, Gallium nitride, Ultraviolet radiation, Electrodes, Thermal effects, Internal quantum efficiency
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