Dr. Yevgeniy G. Churin
at KLA Corp
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 13 February 2008 Paper
Vincent Issier, Boris Kharlamov, Thomas Kraft, Andy Miller, David Simons, James Wong, Simon Wong, Andre Wong, Kuochou Tai, Nicolas Guerin, Daniel Zou, Victor Rossin, Marc von Gunten, William Minford, Andy Hulse, Colette Paillet-Allison, Krishnan Parameswaran, Evgeny Churin, Rob Waarts
Proceedings Volume 6875, 687514 (2008) https://doi.org/10.1117/12.761927
KEYWORDS: Waveguides, Semiconductor lasers, Modulation, Second-harmonic generation, Solid state lasers, Fiber lasers, Packaging, Solid state electronics, Frequency conversion, Phase matching

Proceedings Article | 15 May 1997 Paper
Vadim Cherkashin, Evgeny Churin, Victor Korolkov, Voldemar Koronkevich, Andrey Kharissov, Alexander Poleshchuk, James Burge
Proceedings Volume 3010, (1997) https://doi.org/10.1117/12.274415
KEYWORDS: Holograms, Etching, Chromium, Computer generated holography, Optical fabrication, Wavefronts, Optical testing, Laser applications, Oxides, Spatial resolution

Proceedings Article | 19 January 1995 Paper
Voldemar Koronkevich, Valery Kiryanov, Victor Korolkov, Alexander Poleshchuk, Vadim Cherkashin, Evgeny Churin, Andrey Kharissov
Proceedings Volume 2363, (1995) https://doi.org/10.1117/12.199647
KEYWORDS: Chromium, Diffractive optical elements, Laser systems engineering, Amorphous silicon, Photoresist materials, Transmittance, Silicon films, Image processing, Modulation, Raster graphics

Proceedings Article | 1 October 1991 Paper
Galina Lenkova, Evgeny Churin
Proceedings Volume 1574, (1991) https://doi.org/10.1117/12.50113
KEYWORDS: Computer generated holography, Ions, Semiconductor lasers, Diffraction, Diffractive optical elements, Optical components, Refraction, Monochromatic aberrations, Photoresist materials, Point spread functions

Proceedings Article | 1 October 1991 Paper
Jens Hossfeld, Erwin Jaeger, Theo Tschudi, Evgeny Churin, Voldemar Koronkevich
Proceedings Volume 1574, (1991) https://doi.org/10.1117/12.50121
KEYWORDS: Holograms, Beam shaping, Ray tracing, Diffraction, Computer generated holography, Computer simulations, Fourier transforms, Iterative methods, Diffractive optical elements, Optical design

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