Dr. Yen-Liang Chen Profile

Dr. Yen-Liang Chen

at Taiwan Semiconductor Manufacturing Co Ltd

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 21 November 2023 Presentation + Paper

EUV APSM mask prospects and challenges

Shy-Jay Lin, Chien-Min Lee, Yen-Liang Chen, Kuo-Lun Tai, Lee-Feng Chen, Chien-Chao Huang, Frankie F. Tsai

Proceedings Volume 12751, 127510N (2023) https://doi.org/10.1117/12.2688111

KEYWORDS: 3D mask effects, Extreme ultraviolet, Extreme ultraviolet lithography, Thermal stability, Stochastic processes, Semiconducting wafers, Refractive index, Projection systems, Photoresist materials, Photons

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Proceedings Article | 18 April 2013 Paper

Reduction of image-based ADI-to-AEI overlay inconsistency with improved algorithm

Yen-Liang Chen, Shu-Hong Lin, Kai-Hsiung Chen, Chih-Ming Ke, Tsai-Sheng Gau

Proceedings Volume 8681, 86812P (2013) https://doi.org/10.1117/12.2010570

KEYWORDS: Semiconducting wafers, Overlay metrology, Artificial intelligence, Evolutionary algorithms, Quality measurement, Microscopes, Etching, Semiconductor manufacturing, Optical properties, Chemical mechanical planarization

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Proceedings Article | 5 April 2012 Paper

Quality indicators of image-based overlay

Yen-Liang Chen, Jacky Huang, Rita Lee, Chen-Ming Wang, Chih-Ming Ke, Tsai-Sheng Gau

Proceedings Volume 8324, 83241C (2012) https://doi.org/10.1117/12.917995

KEYWORDS: Overlay metrology, Artificial intelligence, Image quality, Quality measurement, Image processing, Tolerancing, Process control, Semiconducting wafers, Optical alignment, Metrology

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SPIE Journal Paper | 1 April 2011

Optimal sampling conditions for a commonly used charge-coupled device camera in the full-field heterodyne interferometry

Hung-Chih Hsieh, Wang-Tsung Wu, Wei-Yao Chang, Yen-Liang Chen, Der-Chin Su

OE, Vol. 50, Issue 04, 045601, (April 2011) https://doi.org/10.1117/12.10.1117/1.3567172

KEYWORDS: Heterodyning, Signal processing, Interferometry, Cameras, CCD cameras, Charge-coupled devices, Digital cameras, Fourier transforms, Optical engineering, Phase measurement

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Proceedings Article | 24 August 2010 Paper

Step height measurement by using heterodyne central fringe identification technique

W. Wu, H. Hsieh, Y. Chen, W. Chang, D. Su

Proceedings Volume 7767, 77670J (2010) https://doi.org/10.1117/12.860356

KEYWORDS: Heterodyning, Interferometers, Light sources, Geometrical optics, Beam splitters, Mirrors, Phase modulation, Electrooptic modulators, Michelson interferometers, Tunable diode lasers

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Proceedings Article | 2 August 2010 Paper

Two-dimensional refractive index distribution measurement of a GRIN lens

H. Hsieh, Y. Chen, W. Wu, W. Chang, D. Su

Proceedings Volume 7791, 77910A (2010) https://doi.org/10.1117/12.860352

KEYWORDS: Refractive index, GRIN lenses, Phase shifts, CMOS cameras, Commercial off the shelf technology, Interferometers, Interferometry, Electrooptic modulators, Phase interferometry, Mirrors

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Proceedings Article | 17 June 2009 Paper

Method for measuring the refractive index distribution of a GRIN lens with heterodyne interferometry

H. Hsieh, Y. Chen, W. Wu, D. Su

Proceedings Volume 7390, 73900G (2009) https://doi.org/10.1117/12.827319

KEYWORDS: Refractive index, GRIN lenses, Fourier transforms, Heterodyning, Interferometry, Phase measurement, CMOS cameras, Light, Light sources, Geometrical optics

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Proceedings Article | 17 June 2009 Paper

Full-field absolute phase measurements in the heterodyne interferometer with an electro-optic modulator

Y. Chen, H. Hsieh, W. Wu, D. Su

Proceedings Volume 7390, 73900F (2009) https://doi.org/10.1117/12.828391

KEYWORDS: Phase measurement, Electrooptic modulators, Heterodyning, Interferometers, Cameras, Modulators, Polarization, Light sources, Curium, CMOS cameras

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SPIE Journal Paper | 1 December 2008

Nano-roughness measurements with a modified Linnik microscope and the uses of full-field heterodyne interferometry

Yen-Liang Chen, Zhi-Cheng Jian, Hung-Chih Hsieh, Wang-Tsung Wu, Der-Chin Su

OE, Vol. 47, Issue 12, 125601, (December 2008) https://doi.org/10.1117/12.10.1117/1.3050357

KEYWORDS: Fourier transforms, Microscopes, Heterodyning, Gaussian filters, Molybdenum, CMOS cameras, Interferometry, Standards development, Collimation, Optical engineering

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SPIE Journal Paper | 1 November 2007

Optimal condition for full-field heterodyne interferometry

Zhi-Cheng Jian, Yen-Liang Chen, Hung-Chih Hsieh, Po-Jen Hsieh, Der-Chin Su

OE, Vol. 46, Issue 11, 115604, (November 2007) https://doi.org/10.1117/12.10.1117/1.2802095

KEYWORDS: Heterodyning, Interferometry, Digital cameras, Signal processing, Fourier transforms, Optical engineering, Cameras, Digital signal processing, Visibility, Transform theory

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Proceedings Article | 18 August 2005 Paper

Size effects on stylus tip reconstruction for micro and nano roughness measurement

Chao-Chang Chen, Jr-Rung Chen, Huay-Chung Liou, Yen-Liang Chen

Proceedings Volume 5879, 58790H (2005) https://doi.org/10.1117/12.616831

KEYWORDS: Surface roughness, Scanning probe microscopy, Standards development, Reconstruction algorithms, Convolution, Ear, Calibration, Algorithm development, Analytical research, Scanning electron microscopy

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Proceedings Article | 12 April 2005 Paper

Fiber optic interferometric sensors for micro-positioning applications

Kai-Yu Cheng, Yu Yi Su, Yen-Liang Chen, Hung-Ming Tai, Jung-Tsung Chou

Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621943

KEYWORDS: Fiber optics sensors, Ferroelectric materials, Sensors, Actuators, Interferometry, Microscopes, Fiber optics, Mirrors, Channel projecting optics, 3D image processing

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Showing 5 of 12 publications

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