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Yasuhiro Adachi
at Gigaphoton Inc
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Publications (2)
Proceedings Article | 9 April 2024 Presentation + Paper
Enhancing M2 beam quality factor for high power KrF laser for glass micro-via fabrication in advanced packaging
Yasufumi Kawasuji, Akira Suwa, Yasuhiro Adachi, Tomonari Tanaka, Hironori Igarashi, Kouji Kakizaki
Proceedings Volume 12956, 1295605 (2024) https://doi.org/10.1117/12.3010372
KEYWORDS: Laser resonators, Excimer lasers, Glasses, Semiconductors, Advanced packaging
Proceedings Article | 5 March 2021 Presentation
Micro-via fabrication of glass material for semiconductor packaging by 248 nm excimer laser
Yasufumi Kawasuji, Akira Suwa, Yasuhiro Adachi, Masakazu Kobayashi, Kouji Kakizaki, Masakazu Washio
Proceedings Volume 11673, 116730E (2021) https://doi.org/10.1117/12.2578038
KEYWORDS: Glasses, Semiconductors, Semiconductor materials, Packaging, Excimer lasers, Semiconducting wafers, Silicon films, Silicon, Pulsed laser operation, Laser drilling
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