In aerospace and high power laser devices, fused quartz material is in large demand because of its strong adaptability.The fused quartz optical mirror blank was processed by ultra-precision grinding, magnetorheological machining (MRF) and small smooth polishing (SP).Ultra-precision grinding machine was used for rough pre-polishing to obtain high precision surface shape, and then MRF was used for ultra-precision polishing to further improve the surface shape.The medium and high frequency errors generated by MRF processing were controlled by using smooth polishing.The experiments of ultra-precision machining of fused quartz mirror were carried out by using the combined process, and the rapid convergence of deterministic machining and full frequency error was realized.The combined process can not only improve the processing efficiency of optical mirror, but also reduce the processing cost and realize short process processing.
The nondestructive and economical removal of sol-gel SiO2 coating is significant for the recovery and reuse of fused silica optical elements. Compared with conventional wet cleaning process, ion beam etching as a dry cleaning process has atomic-scale removal capacity which is highly stable, non-contact and environment-friendly. In this research, a series of ion beam etching experiments is conducted to investigate the removal efficiency of antireflection sol-gel SiO2 coating and substrate material. The etched surface roughness and optical performance are also studied. The best removal parameters during ion beam etching are determined based on the maximum removal efficiency ratio between antireflection sol-gel SiO2 coating and substrate material. Moreover, the surface roughness and shape of fused silica are both improved during ion beam etching process. The optical transmission of etched surface is reduced to the substrate level and the surface chemical structure remains the same. The results can be a reference for using ion beam etching process technology to clean antireflection sol-gel SiO2 coating of fused silica optics in inertial confinement fusion facility.
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