Dr. Xinkang Tian Profile

Dr. Xinkang Tian

VP of Technology at Tokyo Electron America Inc

SPIE Involvement:

Author

Area of Expertise:

Optical metrology , Optical inspection , Optical imaging , Machine vision , Polarization , Micro-optics

Publications (3)

Proceedings Article | 2 August 1995 Paper

Quantitative surface evaluation using a synchronous Nomarski microscope

Xinkang Tian, Masahide Itoh, Toyohiko Yatagai

Proceedings Volume 2576, (1995) https://doi.org/10.1117/12.215589

KEYWORDS: Reconstruction algorithms, Phase measurement, Computer simulations, System on a chip, Americium, Interferometry, Microscopes, Phase shifts, Wavefronts, Shearing interferometers

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Proceedings Article | 14 June 1995 Paper

Contrast modulation interferometry

Xinkang Tian, Masahide Itoh, Toyohiko Yatagai

Proceedings Volume 2544, (1995) https://doi.org/10.1117/12.211879

KEYWORDS: Modulation, Interferometry, Wavefronts, Modulators, Interferometers, Phase measurement, Algorithm development, Polarizers, Phase shift keying, Evolutionary algorithms

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Proceedings Article | 1 December 1991 Paper

CAD system for CGHs and laser beam lithography

Toyohiko Yatagai, Martial Geiser, Ronglong Tian, Xinkang Tian, Hajime Onda

Proceedings Volume 1555, (1991) https://doi.org/10.1117/12.50616

KEYWORDS: Computer generated holography, Lithography, CAD systems, Holograms, Computing systems, 3D image reconstruction, Laser systems engineering, Nonimpact printing, Optical interconnects, Laser development

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