Xingdi Zhang
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11614, 1161406 (2021) https://doi.org/10.1117/12.2583454
KEYWORDS: Scanning electron microscopy, Wafer inspection, Machine learning, Semiconducting wafers, Databases, Defect detection, Wafer-level optics, Image processing, Semiconductor manufacturing, Optical proximity correction

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