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Dr. Woo-Sok Chang
Director of Technology at Levitronix
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Publications (1)
Proceedings Article | 21 March 2007 Paper
Automatic viscosity controlled production of photoresist
Woo Sok Chang, Christos Monovoukas, Michael Tanaka, Norbert Fronczak
Proceedings Volume 6519, 65193N (2007) https://doi.org/10.1117/12.717976
KEYWORDS: Control systems, Feedback control, Photoresist materials, Temperature sensors, Control systems design, Manufacturing, Coating, Statistical analysis, Semiconductors, Process control
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