From October 2010 to December 2012, the systematic study of the protected aluminum coating which is thermally evaporated downwards for large primary mirror had been developed. By adjusting the structure, it makes the physical nonuniformity of the bare aluminum films in the diameter of 1.8m drop to 4.18%, and the average reflectivity meets 95.09% in the band 400nm-2500nm. The optimized parameters suggest that the SiOx (1<x<2) protective film with the oxygen flow of 50sccm has excellent environmental stability, and the average reflectivity of the protected aluminum coating reduces just less than 5%. Further, the SiOxNy protective film which is formed with 25sccm nitrogen flow not only has the environmental adaptability as the SiOx film but also resists to the salt spray corrosion. But the average reflectivity of the SiOxNy protected aluminum coating decreases about 2%, reach 88.6%, in the band 400nm-2500nm.
In order to evaporate the Ø 2.4m large-scale speculum, we have developed a high-vacuum resistance evaporation machine which is of the nation’s largest bell-type, and we first propose to use the structure of the protected-Al coating with SiO coating by evaporating from top to bottom. The results show that the non-uniformity of aluminum coating is no more than 5.17% within 1.8 meters in diameter, also after environmental testing, there is no change on the mirror surface, and the reflectance decreased less than 1%. The average of the speculum reflectivity is Rav<88%@350nm-1800nm and Rav<90%@ 400nm-2500nm.We have separately completed the Ø 1.8m plane mirror in April 2011 and the Ø 1.8m concave mirror in October 2011. The results show that the PV value is less than λ/10 after evaporation and the RMS value has no change.
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