Dr. Wan Hua Profile

Dr. Wan Hua

at Soochow Univ

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Publications (2)

Proceedings Article | 4 January 2008 Paper

Study on the fabrication of low-gradient photoresist grating masks

Quan Liu, Hua Wan, Jianhong Wu, Xinrong Chen, Chaoming Li

Proceedings Volume 6832, 68320X (2008) https://doi.org/10.1117/12.755101

KEYWORDS: Photoresist materials, Photoresist developing, Holography, Etching, Ion beams, Diffraction gratings, Computer simulations, Coating, Lithium, Laser development

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Proceedings Article | 7 February 2005 Paper

Study on the characteristics of multilayer dielectric grating mask profile by the RCW method

Hua Wan, Xin-rong Chen, Jian-hong Wu

Proceedings Volume 5636, (2005) https://doi.org/10.1117/12.575979

KEYWORDS: Diffraction gratings, Dielectrics, Diffraction, Dielectric polarization, Software, Signal detection, Analytical research, Reflectivity, Scanning electron microscopy, Etching

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