Mr. Wallace P. Printz Profile

Wallace P. Printz

Process Engineer at Tokyo Electron America Inc

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Publications (3)

Proceedings Article | 19 March 2012 Paper

Line-pattern collapse mitigation status for EUV at 32nm HP and below

Michael Carcasi, Derek Bassett, Wallace Printz, Shinichiro Kawakami, Yuichiro Miyata

Proceedings Volume 8325, 83250K (2012) https://doi.org/10.1117/12.916310

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Finite element methods, Capillaries, Polymers, Line width roughness, Neodymium, Polymer thin films, Protactinium, Semiconducting wafers

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Proceedings Article | 1 April 2009 Paper

Process latitude simulation of positive-tone litho-litho-etch double patterning

Wallace Printz, Steven Scheer

Proceedings Volume 7273, 72731H (2009) https://doi.org/10.1117/12.816581

KEYWORDS: Diffusion, Double patterning technology, Photoresist processing, Lithography, Fiber optic illuminators, Chemistry, Image processing, Calibration, Critical dimension metrology, Printing

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Proceedings Article | 16 March 2009 Paper

Advances and challenges in dual-tone development process optimization

Carlos Fonseca, Mark Somervell, Steven Scheer, Wallace Printz, Kathleen Nafus, Shinichi Hatakeyama, Yuhei Kuwahara, Takafumi Niwa, Sophie Bernard, Roel Gronheid

Proceedings Volume 7274, 72740I (2009) https://doi.org/10.1117/12.814289

KEYWORDS: Image processing, Photoresist processing, Double patterning technology, Photomasks, Optical lithography, Printing, Scanning electron microscopy, Scanners, Manufacturing, Lithography

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