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Vinh V. Ngo
at Thermo Fisher Scientific Inc
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Author
Publications (2)
Proceedings Article | 21 July 2000 Paper
Thermomechanical simulations for microbeam reduction lithography
Gary Frisque, Po-Tung Lee, Edward Lovell, Roxann Engelstad, Ka-Ngo Leung, Vinh Ngo, Karen Scott
Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390097
KEYWORDS: Lithography, Photomasks, Silicon, Chemical elements, Semiconducting wafers, Ions, Thermal modeling, Projection lithography, Ion beams, Systems modeling
Proceedings Article | 15 November 1999 Paper
Optics study of the MMRL system
Vinh Ngo, Ka-Ngo Leung
Proceedings Volume 3777, (1999) https://doi.org/10.1117/12.370126
KEYWORDS: Ions, Beam shaping, Monochromatic aberrations, Semiconducting wafers, Distortion, Electrodes, Plasma, Chromatic aberrations, Lithography, Photomasks
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