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Dr. Vadim Sirotkin
at IMTHPM
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Publications (1)
Proceedings Article | 18 March 2009 Paper
Optimization of droplets for UV-NIL using coarse-grain simulation of resist flow
Vadim Sirotkin, Alexander Svintsov, Sergey Zaitsev
Proceedings Volume 7271, 72712I (2009) https://doi.org/10.1117/12.813959
KEYWORDS: Computer simulations, Mathematical modeling, 3D modeling, Motion models, Nanoimprint lithography, Photoresist processing, Computing systems, Finite difference methods, Numerical analysis, Ultraviolet radiation
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