Prof. Vadim A. Shakhnov Profile

Prof. Vadim A. Shakhnov

at BMSTU

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Author

Publications (3)

Proceedings Article | 30 December 2016 Paper

Simulation of heavy charged particles damage on MEMS

V. Shakhnov, A. Glushko, V. Makarchuk, L. Zinchenko, V. Terekhov, S. Mikhaylichenko

Proceedings Volume 10224, 102241C (2016) https://doi.org/10.1117/12.2266750

KEYWORDS: Microelectromechanical systems, Particles, Fractal analysis, Ions, Electrons, Dielectrics, Silicon, Neon, Computer simulations, Semiconductors

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Proceedings Article | 18 December 2014 Paper

Modeling and simulation of nanoelectronics devices in cognitive nanoinformatics

Vadim Shakhnov, Lyudmila Zinchenko, Elena Rezchikova

Proceedings Volume 9440, 944018 (2014) https://doi.org/10.1117/12.2179168

KEYWORDS: Nanoelectronics, Modeling and simulation, Cognitive modeling, Instrument modeling, Data modeling, Resistors, Nanotechnology, 3D modeling, Carbon nanotubes, Nanostructures

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Proceedings Article | 18 December 2014 Paper

SOI layout decomposition for double patterning lithography on high-performance computer platforms

Vladimir Verstov, Lyudmila Zinchenko, Vladimir Makarchuk

Proceedings Volume 9440, 94400X (2014) https://doi.org/10.1117/12.2180809

KEYWORDS: Double patterning technology, Metals, Lithography, Silicon, Very large scale integration, Transistors, Optical lithography, Computing systems, Photomasks, Computer programming

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