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Dr. V. R. Reddy
at UGC-DAE Consortium for Scientific Research
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 23 August 2017 Presentation + Paper
Fabrication and characterization of W/B4C lamellar multilayer grating and NbC/Si multilayer phase-shift reflector
P. Pradhan, S. Bhartiya, A. Singh, A. Majhi, A. Gome, R. Dhawan, M. Nayak, P. Sahoo, S. Rai, V. Reddy
Proceedings Volume 10386, 1038605 (2017) https://doi.org/10.1117/12.2273617
KEYWORDS: Multilayers, Reflectors, X-rays, Optical lithography, Sputter deposition, Reflectivity, Atomic force microscopy, Silicon, X-ray optics, Structural analysis
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