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Ubaldo Aleriano-Sanchez
Engineer at RWTH-Aachen
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Author
Publications (2)
Proceedings Article | 1 July 2005 Paper
Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems
Tilo Pfeifer, Robert Schmitt, Ubaldo Aleriano
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608980
KEYWORDS: Microscopes, Confocal microscopy, Microelectromechanical systems, Nanoelectromechanical systems, Objectives, Atomic force microscopy, Beam splitters, Image processing, Metrology, Computer aided design
Proceedings Article | 25 March 2003 Paper
Gripping tool for MEMS assembly with an absolute distance measurement sensor using a fiber optic WL interferometer with high measuring frequency
Tilo Pfeifer, Ubaldo Aleriano, Frank Depiereux
Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.468417
KEYWORDS: Fiber optics sensors, Sensors, Interferometers, Manufacturing, Microelectromechanical systems, Distance measurement, Fiber optics tests, Fiber optics, Photodetectors, Metrology
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