The work of the authors' group on monolithic integrated in-plane semiconductor lasers using grating components are reviewed and the recent development is reported. The grating components provide not only feedback for lasing but also novel functions such as output beam shaping and wavelength tuning. The design and fabrication of the grating components in semiconductor waveguide are outlined, and the area-selective quantum-well disordering by impurity-free vacancy diffusion is described as an effective technique to reduce the absorption loss in the passive waveguide. Then, device description, design, fabrication and experimental results of integrated master oscillator power amplifier (MOPA) lasers, high-power tunable extended-cavity lasers, and a broad-area angled-grating distributed Bragg reflector (DBR) lasers using InGaAs/AlGaAs GRIN-SCH-SQW structures are presented. All the lasers have integrated beam forming grating coupler, and allow implementation of compact and stable lensless modules that emit a collimated output beam.
Grating coupled surface emitting lasers (GCSELs) are in- plane lasers monolithically integrated with grating outcouplers for beam shaping and image generation. Highly directional and efficient outcouplers can be formed using various grating and waveguide geometries. Beam shaping features are incorporated using a computer generated waveguide hologram that allows the wavefront of the emitted light to be tailored for the required beam shape. Requirements on the integrated in-plane laser include a wide and spatially coherent guided wave with a minimum of wavefront distortion and a stable emission wavelength. Promising lasers for this purpose are master-oscillator power-amplifier configurations as well as various kinds of unstable resonator designs. Here we present results from modeling and experiments on the key elements of GCSELs as well as fully integrated GCSELs of linear and circular geometries.
The present status of waveguide-type integrated-optic disc pickups are reviewed. The authors have proposed and fabricated several types, and have demonstrated their fundamental functions. For the ROM pickup, they successfully reduced the focused spot to a diameter that is slightly larger than the diffraction-limited value, and confirmed capability of the focusing/tracking error signal detection. The pickup was extended to that for magneto-optical (MO) disc system, and the MO pickup was found experimentally to detect a polarization rotation as small as one contained in the signal beam reflected from MO medium. The pickup for parallel-data cards was also fabricated with photodiode array, and seven-track parallel readout was demonstrated. It was found by theoretical analysis that the waveguide-FGC combined type pickup has the possibility of super-resolution readout.
Conference Committee Involvement (1)
Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits
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