Dr. Tomofumi Miyauchi Profile

Dr. Tomofumi Miyauchi

at Renesas Technology Corp

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 1 April 2009 Paper

Defect reduction in non-topcoat resist by selective segregation removal step

Takuya Hagiwara, Mamoru Terai, Takeo Ishibashi, Tomofumi Miyauchi, Shinya Hori, Teruhiko Kumada, Tomoya Kumagai, Atsushi Sawano, Kosuke Doi, Takeshi Matsunobe, Naoki Man, Hirofumi Seki, Yusaku Tanahashi, Tetsuro Hanawa

Proceedings Volume 7273, 727324 (2009) https://doi.org/10.1117/12.813643

KEYWORDS: Polymers, Photoresist processing, Semiconducting wafers, Lithography, Coating, Photomasks, Chemical analysis, Critical dimension metrology, Fluorine, Scanners

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Proceedings Article | 30 June 2006 Paper

Performace trends for the x-ray imaging spectrometer on Suzaku

Beverly LaMarr, Mark Bautz, Steve Kissel, Eric Miller, Gregory Prigozhin, Noriaki Tawa, Tomofumi Miyauchi, Hiroshi Nakajima

Proceedings Volume 6270, 62701R (2006) https://doi.org/10.1117/12.671446

KEYWORDS: Charge-coupled devices, Manganese, Calibration, X-ray imaging, Spectroscopy, X-rays, Bismuth, Spectral resolution, CCD image sensors, Sensors

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Proceedings Article | 17 September 2005 Paper

High-resolution hard x-ray detector with scintillator-deposited charge-coupled device

E. Miyata, N. Anabuki, N. Tawa, K. Mukai, T. Miyauchi, H. Tsunemi, K. Miyaguchi

Proceedings Volume 5922, 59220U (2005) https://doi.org/10.1117/12.615626

KEYWORDS: Charge-coupled devices, X-rays, Hard x-rays, Sensors, Scintillators, Photons, Visible radiation, Bismuth, X-ray detectors, X-ray telescopes

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Proceedings Article | 11 October 2004 Paper

Soft x-ray response of x-ray CCD camera XIS onboard Astro-E2

Kiyoshi Hayashida, Kennichi Torii, Masaaki Namiki, Takayuki Shiroshoji, Masayuki Shoji, Satoru Katsuda, Daisuke Matsuura, Tomofumi Miyauchi, Hiroshi Tsunemi, Takayoshi Kohmura, Haruyoshi Katayama

Proceedings Volume 5488, (2004) https://doi.org/10.1117/12.552037

KEYWORDS: X-rays, Calibration, Quantum efficiency, Charge-coupled devices, Cameras, Fermium, Frequency modulation, CCD cameras, Spectroscopy, X-ray imaging

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