Mr. Toby Hallam Profile

Toby Hallam

at Univ of New South Wales

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Publications (2)

Proceedings Article | 28 February 2005 Paper

The fabrication of devices in silicon using scanning probe microscopy

Frank Ruess, Lars Oberbeck, Michelle Simmons, Kuan Eng Goh, Alex Hamilton, Toby Hallam, Neil Curson, Robert Clark

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.582283

KEYWORDS: Silicon, Scanning tunneling microscopy, Chemical species, Phosphorus, Hydrogen, Scanning probe microscopy, Lithography, Optical lithography, Electron transport, Quantum computing

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Proceedings Article | 23 February 2005 Paper

STM characterization of phosphine adsorption on STM-patterned H:Si(001)surfaces

Toby Hallam, Neil Curson, Lars Oberbeck, Michelle Simmons

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.583316

KEYWORDS: Adsorption, Hydrogen, Lithography, Scanning tunneling microscopy, Silicon, Molecules, Chemical species, Phosphorus, Control systems, Quantum computing

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