Dr. Timothy J. Dalton Profile

Dr. Timothy J. Dalton

at GlobalFoundries

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 14 September 2001 Paper

193 lithography and RELACS processing for BEOL lithography

Ronald DellaGuardia, Karen Petrillo, Jia Chen, Paul Rabidoux, Timothy Dalton, Steven Holmes, Linda Hadel, K. Malone, Arpan Mahorowala, S. Greco, Richard Ferguson

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435636

KEYWORDS: Photomasks, Lithography, Semiconducting wafers, Printing, Etching, Photoresist processing, Optical proximity correction, 193nm lithography, Photoresist materials, Resistance

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Proceedings Article | 14 September 2001 Paper

When is bilayer thin-film imaging suitable: comparison with single-layer resists

Scott Halle, Alan Thomas, Michael Armacost, Timothy Dalton, Xiaochun Chen, Scott Bukofsky, Oliver Genz, Zhijian Lu, Shahid Butt, Zheng Chen, Richard Ferguson, Eric Coker, Robert Leidy, Qinghuang Lin, Arpan Mahorowala, Katherina Babich, Karen Petrillo, Marie Angelopoulos, Mark Ignatowicz, Bang Bui

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435797

KEYWORDS: Etching, Photomasks, Dielectrics, Lithography, Oxides, Thin films, Silicon, Reactive ion etching, Photoresist processing, Scanning electron microscopy

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Proceedings Article | 18 December 1998 Paper

Fiber optic polymer residue monitor

Kent Pfeifer, Robert Jarecki, Timothy Dalton

Proceedings Volume 3539, (1998) https://doi.org/10.1117/12.333752

KEYWORDS: Etching, Polymers, Sensors, Plasma, Optical fibers, Reflectivity, Refraction, Fiber optics, Plasma etching, Fiber optics sensors

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