Tim C. Rigden
at Nanometrics Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 24 March 2006 Paper
Y. Ku, C. Tung, Y. Li, H. Pang, N. Smith, L. Binns, T. Rigden, G. Reynolds, H. Fink
Proceedings Volume 6152, 615214 (2006) https://doi.org/10.1117/12.655953
KEYWORDS: Overlay metrology, Data modeling, Scanning electron microscopy, Image processing, Process control, Image resolution, Semiconducting wafers, Tolerancing, Lithography, Image acquisition

Proceedings Article | 17 May 2005 Paper
Lewis Binns, Greg Reynolds, Timothy Rigden, Stephen Watkins, Andrew Soroka
Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.599613
KEYWORDS: Semiconducting wafers, Network architectures, Overlay metrology, Transparency, Genetic algorithms, Metrology, Time metrology, Neural networks, Data modeling, Optimization (mathematics)

Proceedings Article | 17 May 2005 Paper
Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.599492
KEYWORDS: Pattern recognition, Semiconducting wafers, Target recognition, Image processing, Data modeling, Metals, Metrology, Detection and tracking algorithms, Overlay metrology, Wafer-level optics

Proceedings Article | 10 May 2005 Paper
Timothy Rigden, Andrew Soroka, Lewis Binns
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599744
KEYWORDS: Cameras, Semiconducting wafers, Overlay metrology, Digital cameras, Interference (communication), Clocks, Metrology, Digital imaging, Imaging systems, Frame grabbers

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