Ms. Tianjiao Shu Profile

Tianjiao Shu

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Publications (1)

Proceedings Article | 16 December 2022 Paper

Laser marking micro ID for wafer identification

Lingling Zhang, Tianjiao Shu, Guoqi Li, Yuanchao Du, Yuan Chen, Jie Zhang

Proceedings Volume 12501, 125011D (2022) https://doi.org/10.1117/12.2656633

KEYWORDS: Semiconducting wafers, Laser marking, Silicon, Optical character recognition, Image compression, Polishing, Pulsed laser operation, Manufacturing, Laser cutting, Technology

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