Mr. Thomas Schuster Profile

Thomas Schuster

at Univ Stuttgart

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Author

Publications (5)

Proceedings Article | 3 October 2008 Paper

Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry

Thomas Schuster, Stephan Rafler, Karsten Frenner, Wolfgang Osten

Proceedings Volume 7155, 71550W (2008) https://doi.org/10.1117/12.814532

KEYWORDS: Line edge roughness, Scatterometry, Diffraction, Spectroscopic ellipsometry, Spectroscopy, Computer simulations, Polarization, Semiconductors, Lithography, Critical dimension metrology

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Proceedings Article | 25 April 2008 Paper

Investigation of methods to set up the normal vector field for the differential method

Stephan Rafler, Peter Götz, Matthias Petschow, Thomas Schuster, Karsten Frenner, Wolfgang Osten

Proceedings Volume 6995, 69950Y (2008) https://doi.org/10.1117/12.780482

KEYWORDS: Refractive index, Lithium, Aluminum, 3D image processing, Maxwell's equations, Diffraction, Fourier transforms, Raster graphics, Image filtering, Magnetism

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Proceedings Article | 16 April 2008 Paper

Improvements on the simulation of microscopic images for the defect detection of nanostructures

Stephan Rafler, Thomas Schuster, Karsten Frenner, Wolfgang Osten, Uwe Seifert

Proceedings Volume 6922, 692215 (2008) https://doi.org/10.1117/12.772498

KEYWORDS: Defect detection, Etching, Semiconducting wafers, Diffraction, Nanostructures, Wafer-level optics, Scanning electron microscopy, Polarization, Computer simulations, Manufacturing

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Proceedings Article | 18 June 2007 Paper

Scatterometry from crossed grating structures in different configurations

Thomas Schuster, Stephan Rafler, Wolfgang Osten, Peter Reinig, Thomas Hingst

Proceedings Volume 6617, 661715 (2007) https://doi.org/10.1117/12.726229

KEYWORDS: Scatterometry, Picosecond phenomena, Polarization, Scanning electron microscopy, Diffraction, Jones vectors, Etching, Ellipsometry, Spectroscopic ellipsometry, Systems modeling

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Proceedings Article | 10 September 2004 Paper

A new calibration scheme for the three-dimensional depth-scanning fringe projection measurement method

Jean-Marc Nivet, Thomas Schuster, Klaus Korner, Ulrich Droste, Hans Tiziani, Wolfgang Osten

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.544251

KEYWORDS: Calibration, 3D metrology, 3D acquisition, CCD cameras, Ronchi rulings, Distortion, Mathematical modeling, Clouds, Signal processing, Imaging systems

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