Tao Shen
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | 5 August 2024 Open Access
Tao Shen, Iacopo Mochi, Dongmin Jeong, Elisabeth Mueller, Paolo Ansuinelli, Jinho Ahn, Yasin Ekinci
JM3, Vol. 23, Issue 04, 049801, (August 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.049801
KEYWORDS: Silicon, Scanning transmission electron microscopy, Ruthenium, Reflectometry, Phase shifts, Molybdenum, Extreme ultraviolet, Attenuation, Design, Biological samples

SPIE Journal Paper | 12 July 2024 Open Access
Tao Shen, Iacopo Mochi, Dongmin Jeong, Elisabeth Mueller, Paolo Ansuinelli, Jinho Ahn, Yasin Ekinci
JM3, Vol. 23, Issue 04, 041402, (July 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.041402
KEYWORDS: Reflectivity, Extreme ultraviolet, Ruthenium, Silicon, Light sources and illumination, Reflectometry, Refractive index, Scanning transmission electron microscopy, Grazing incidence, Statistical modeling

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129550D (2024) https://doi.org/10.1117/12.3010875
KEYWORDS: Extreme ultraviolet, Reflectometry, Scatterometry, Grazing incidence, Diffraction, Diffraction gratings, Reflectivity, Overlay metrology

Proceedings Article | 15 August 2023 Presentation + Paper
Tao Shen, Paolo Ansuinelli, Iacopo Mochi, Young Woo Kang, Jinho Ahn, Yasin Ekinci
Proceedings Volume 12618, 126180N (2023) https://doi.org/10.1117/12.2673832
KEYWORDS: Scatterometry, Reflectometry, Reflectivity, Diffraction gratings, Semiconducting wafers, Coherence imaging, Metrology, Extreme ultraviolet, Diffraction, Imaging systems

Proceedings Article | 27 April 2023 Presentation + Paper
Tao Shen, Paolo Ansuinelli, Iacopo Mochi, Yasin Ekinci
Proceedings Volume 12496, 124960Z (2023) https://doi.org/10.1117/12.2658436
KEYWORDS: Extreme ultraviolet, Diffraction, Semiconducting wafers, Metrology, Scatterometry, Grazing incidence, Diffraction gratings, Reflectometry

Showing 5 of 12 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top