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Taeyoung Kim
at KAIST
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Author
Publications (4)
Proceedings Article | 25 April 2024 Presentation + Paper
A fast and accurate PEB simulation through recurrent neural network
Proceedings Volume 12954, 129540G (2024) https://doi.org/10.1117/12.3010292
KEYWORDS: Palladium, Systems modeling, Quenching, Photoresist materials, Neural networks, Fused deposition modeling, Machine learning, Lithography, Education and training, Process modeling
Proceedings Article | 28 April 2023 Paper
Fast and accurate prediction of process variation band with custom kernels extracted from convolutional networks
Proceedings Volume 12495, 124951Z (2023) https://doi.org/10.1117/12.2658307
KEYWORDS: Lithography, Simulations, Semiconducting wafers, Wafer-level optics, Calibration, Printing, Convolution, Linear regression, Convolutional neural networks, Computational lithography
Proceedings Article | 28 April 2023 Poster + Paper
Optical proximity correction with PID control through reinforcement learning
Proceedings Volume 12495, 1249524 (2023) https://doi.org/10.1117/12.2658484
KEYWORDS: Optical proximity correction, Lithography, Semiconducting wafers, Feature extraction, Bias correction, Adaptive control
Proceedings Article | 26 May 2022 Presentation + Paper
Refragmentation through machine learning classifier for fast and accurate optical proximity correction
Proceedings Volume 12052, 120520S (2022) https://doi.org/10.1117/12.2614339
KEYWORDS: Optical proximity correction, Photomasks, Machine learning, Lithography, Convolution, Principal component analysis, Feature extraction
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