Prof. Tae-Gon Kim Profile

Prof. Tae-Gon Kim

at Hanyang Univ

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Publications (2)

Proceedings Article | 1 December 2022 Paper

Removal behavior of Sn and Pb contaminants on EUV mask after EUV exposure

Dong-Hyeon Kwon, Hyun-Gyu Kang, Tae-Gon Kim, Jin-Ho Ahn, Sang-Sul Lee, Jin-Goo Park

Proceedings Volume 12293, 122930B (2022) https://doi.org/10.1117/12.2641800

KEYWORDS: Particles, Tin, Lead, Ruthenium, Extreme ultraviolet lithography, Silicon, Atomic force microscopy, Extreme ultraviolet

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Proceedings Article | 16 November 2022 Presentation

Damage-free pinpoint particle removal for EUV pellicle cleaning

Hyun-Gyu Kang, Dong Hyeon Kwon, Tae-Gon Kim, Jin-Ho Ahn, Byung-Hoon Lee, Jin-Goo Park, Hwan Seok Seo, Hee Bom Kim

Proceedings Volume PC12293, PC1229308 (2022) https://doi.org/10.1117/12.2641583

KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Safety, Particle systems, Particle contamination, Atomic force microscopy, Silica, Optical microscopes, Nanomanipulation

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