Dr. Tae-Gon Kim
Senior Metrology Researcher at imec
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 29 March 2011 Paper
Tae-Gon Kim, Els Kesters, Herbert Struyf, Paul Mertens, Stefan De Gendt, Marc Heyns
Proceedings Volume 7969, 79690L (2011) https://doi.org/10.1117/12.881608
KEYWORDS: Particles, Silica, Humidity, Extreme ultraviolet, Atomic force microscopy, Silicon, Semiconducting wafers, Photomasks, Extreme ultraviolet lithography, Neodymium

Proceedings Article | 21 March 2008 Paper
Proceedings Volume 6921, 69213Q (2008) https://doi.org/10.1117/12.772533
KEYWORDS: Reflectivity, Photomasks, Critical dimension metrology, Binary data, Phase shifts, Extreme ultraviolet lithography, Molybdenum, Extreme ultraviolet, Deep ultraviolet, Image processing

Proceedings Article | 23 March 2006 Paper
Seung Lee, Tae Kim, Chung Kim, In-Yong Kang, Yong-Chae Chung, Jinho Ahn
Proceedings Volume 6151, 61511Y (2006) https://doi.org/10.1117/12.656928
KEYWORDS: Reflectivity, Deep ultraviolet, Extreme ultraviolet, Aluminum, Ruthenium, Extreme ultraviolet lithography, Photomasks, Etching, Optical simulations, Inspection

SPIE Journal Paper | 1 August 2004
OE, Vol. 43, Issue 08, (August 2004) https://doi.org/10.1117/12.10.1117/1.1764574
KEYWORDS: Holograms, Image restoration, Target detection, 3D acquisition, Remote sensing, Holography, Digital holography, 3D image reconstruction, Target recognition, 3D image processing

Proceedings Article | 27 May 1996 Paper
Tae-Geun Kim, Sung Min Hwang, Seong-Il Kim, Chang-Sik Son, Eun Kim, Suk-Ki Min, Jung-Ho Park, Kyung Hyun Park
Proceedings Volume 2723, (1996) https://doi.org/10.1117/12.240497
KEYWORDS: Gallium arsenide, Photoresist materials, Quantum wells, Photomasks, Semiconductor lasers, Metalorganic chemical vapor deposition, High power lasers, Floods, Photoresist developing, Submicron lithography

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