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Sungtae Kim
at Ultratech - A Division of Veeco
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Publications (1)
Proceedings Article | 28 March 2017 Presentation + Paper
Wafer-shape metrics based foundry lithography
Sungtae Kim, Frida Liang, Jeffrey Mileham, Damon Tsai, Eric Bouche, Sean Lee, Albert Huang, C. F. Hua, Ming Sheng Wei
Proceedings Volume 10145, 101450P (2017) https://doi.org/10.1117/12.2257799
KEYWORDS: Semiconducting wafers, Manufacturing, Lithography, Process control, Metrology, Overlay metrology, Interferometry, Distortion, Chemical mechanical planarization, Inspection, Data modeling, Oxides
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