Dr. Sourish Banerjee Profile

Dr. Sourish Banerjee

at Helmholtz-Zentrum Berlin für Materialien und Energie GmbH

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 5 March 2022 Presentation

Catherine Dubourdieu, Charlotte Van Dijck, Sourish Banerjee, Florian Maudet, Veeresh Deshpande

Proceedings Volume PC12002, PC120020G (2022) https://doi.org/10.1117/12.2620759

KEYWORDS: Oxides, Back end of line, Atomic layer deposition, Gallium, Transistors, Zinc oxide, Silicon, Oxygen, Zinc, Wide bandgap semiconductors

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Keywords/Phrases