Siyuan Liu
at Chinese Academy of Science
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 24 November 2023 Paper
Proceedings Volume 12935, 129355B (2023) https://doi.org/10.1117/12.3008436

Proceedings Article | 12 April 2023 Paper
Proceedings Volume 12565, 125651Q (2023) https://doi.org/10.1117/12.2662479
KEYWORDS: Waveguides, Silicon nitride, Diffraction gratings, Diffraction, Cladding, Photoresist materials, Etching, Design and modelling, Refractive index, Silica

Proceedings Article | 13 December 2021 Paper
Siyuan Liu, Zhuangzhuang Qu, Yuanyuan Fan, Yan Qi, Lujun Bai, Weihu Zhou, Jianming Lu, Yu Wang, Chunrui Han
Proceedings Volume 12073, 1207307 (2021) https://doi.org/10.1117/12.2604003
KEYWORDS: Electron beam lithography, Photonic integrated circuits, Waveguides, Fabrication, Optical alignment, Scanning electron microscopy, Silicon, Chromium, Photonic devices, Integrated photonics

Proceedings Article | 4 December 2020 Paper
Chunrui Han, Yu Wang, Xin Guo, Lujun Bai, Siyuan Liu
Proceedings Volume 11617, 116170Z (2020) https://doi.org/10.1117/12.2584965

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