Dr. Simon G. Keens Profile

Dr. Simon G. Keens

at Ampegon AG

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Publications (2)

Proceedings Article | 18 March 2016 Paper

Free electron lasers for 13nm EUV lithography: RF design strategies to minimise investment and operational costs

Simon Keens, Bernhard Rossa, Marcel Frei

Proceedings Volume 9776, 97760T (2016) https://doi.org/10.1117/12.2218966

KEYWORDS: Free electron lasers, Optical lithography, Extreme ultraviolet, Modulators, Reliability, Extreme ultraviolet lithography, High power lasers, Cryogenics, Amplifiers, Superconductors, Semiconductors, Solid state electronics, System integration, Manufacturing

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Proceedings Article | 13 March 2015 Paper

13nm EUV free electron lasers for next generation photolithography: the critical importance of RF stability

Simon Keens, Bodo Fritsche, Carmen Hiltbrunner, Marcel Frei

Proceedings Volume 9422, 94222Q (2015) https://doi.org/10.1117/12.2181069

KEYWORDS: Amplifiers, Free electron lasers, System integration, Extreme ultraviolet, Solid state electronics, Power supplies, Photons, Optical lithography, Semiconductors, Reliability

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