Dr. Shunquan Wang Profile

Dr. Shunquan Wang

at Shanghai Institute of Optics and Fine Mechanics

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Publications (2)

Proceedings Article | 7 February 2005 Paper

Deep-etched fused silica grating as a (de)multiplexer for DWDM application at the 1.55-µm wavelength

Yanyan Zhang, Changhe Zhou, Huayi Ru, Shunquan Wang

Proceedings Volume 5636, (2005) https://doi.org/10.1117/12.575200

KEYWORDS: Diffraction gratings, Silica, Diffraction, Dense wavelength division multiplexing, Plasma etching, Polarization, Holography, Photoresist materials, Plasma, Etching

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Proceedings Article | 27 January 2005 Paper

Etching analysis of inductively coupled plasma technology for fabrication of micro-optical elements

Shunquan Wang, Changhe Zhou, Huayi Ru, Yanyan Zhang

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.576371

KEYWORDS: Etching, Plasma, Ions, Silica, Polymers, Photomasks, Sputter deposition, Chemical elements, Chemical species, Argon

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