Dr. Shih-Liang Ku
Optics Group Leader
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 February 2010 Paper
Proceedings Volume 7591, 759112 (2010) https://doi.org/10.1117/12.842913
KEYWORDS: Reflectivity, Positron emission tomography, Ions, Etching, Transmittance, Platinum, Antireflective coatings, Surface roughness, Coating, Ion beams

SPIE Journal Paper | 1 July 2009
OE, Vol. 48, Issue 07, 073401, (July 2009) https://doi.org/10.1117/12.10.1117/1.3183906
KEYWORDS: Etching, Thin films, Photonic crystals, Multilayers, Ions, Thin film deposition, Molecular self-assembly, Tantalum, Process modeling, Particles

Proceedings Article | 29 August 2008 Paper
Proceedings Volume 7067, 70670G (2008) https://doi.org/10.1117/12.792002
KEYWORDS: Ions, Thin films, Refractive index, Silicon, Infrared spectroscopy, Silicon films, Absorption, Infrared radiation, Spectroscopy, Transmission electron microscopy

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