Prof. Sheila Gonzalez-Castilla Profile

Prof. Sheila Gonzalez-Castilla

at Univ Politécnica de Madrid

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Author

Publications (2)

Proceedings Article | 19 May 2009 Paper

Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications

Sheila González-Castilla, Jimena Olivares, Marta Clement, Lucía Vergara, Laura Pulido, Enrique Iborra, Jesús Sangrador

Proceedings Volume 7362, 73620X (2009) https://doi.org/10.1117/12.821485

KEYWORDS: Silicon, Etching, Oxides, Sputter deposition, Oxygen, Silicon films, Silica, Absorption, Microelectromechanical systems, Surface micromachining

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Proceedings Article | 21 April 2006 Paper

Tunable mechanical resonator with aluminium nitride piezoelectric actuation

J. Olivares, J. Malo, S. González, E. Iborra, I. Izpura, M. Clement, A. Sanz-Hervás, J. Sánchez-Rojas, P. Sanz

Proceedings Volume 6186, 61860K (2006) https://doi.org/10.1117/12.664444

KEYWORDS: Resonators, Aluminum nitride, Bridges, Laser interferometry, Photodiodes, Sensors, Electrodes, Avalanche photodetectors, Dielectrics, Capacitors

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