The polarization noise is the major factor affecting the long-term zero-bias stability of the integrated optical gyroscope (RIOG). Compared to the silicon, the Si3N4 waveguide has excellent polarization-dependent loss and can maintain a single polarization state. In our work, a transmissive Si3N4 WRR with a bending radius of 8 mm is successfully designed and fabricated. We prove its single-polarization performance through experiments at different temperature. The successful design and fabrication of this WRR is expected to achieve high precision RIOG.
Optical displacement detection is widely used in various MEMS sensors because of its high sensitivity. The optical accelerometer has a high theoretical resolution. To increase the measurement range, we proposed a high-resolution micro-optical accelerometer with electromagnetic force feedback. The optical principle, mechanical structure, and manufacturing process are analyzed. The accelerometer is predicted to work in the first modal with displacement sensitivity at 605 nm/g, corresponding to 0th diffraction beam optical sensitivity 1.1 %/nm. The designed electromagnetic driver can increase the acceleration measurement range from 0.066 g to ±20 g. These results provide a theoretical basis for the design and fabrication of a high-resolution micro-optical accelerometer with an electromagnetic driver.
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