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Sergey A. Sokolov
at MV Lomonosov Moscow State Univ
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Publications (1)
Proceedings Article | 30 December 2016 Paper
Non-destructive determination of thickness of the dielectric layers using EDX
S. Sokolov, E. Kelm, R. Milovanov, D. Abdullaev, L. Sidorov
Proceedings Volume 10224, 1022426 (2016) https://doi.org/10.1117/12.2265570
KEYWORDS: Nondestructive evaluation, Dielectrics, Thin films, Monte Carlo methods, X-rays, Electron beams, Silicon, Aluminum, Silica, Scanning electron microscopy
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