Mr. Serge E. Kozik Profile

Serge E. Kozik

at BI Stepanov Institute of Physics

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Publications (1)

Proceedings Article | 23 May 2011 Paper

Full-scale simulation of angle-resolved focused-beam scatterometry applied to aperiodic isolated features: model validity analysis and numerical results

S. Kozik, A. Smirnov

Proceedings Volume 8083, 80830A (2011) https://doi.org/10.1117/12.889496

KEYWORDS: Scatterometry, Polarization, Near field optics, Optical spheres, Computer simulations, Polarizers, Refractive index, Finite-difference time-domain method, Sensors, Objectives

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