Dr. Sébastien Becker Profile

Dr. Sébastien Becker

R&D Engineer at CEA Grenoble

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Publications (9)

Proceedings Article | 9 July 2018 Paper

Fabrication and characterization of cooled silicon bolometers for mm wave detection

V. Goudon, A. Aliane, C. Vialle, W. Rabaud, S. Pocas, H. Kaya, R. Torrecillas, J.-L. Ouvrier-Buffet, L. Dussopt, P. Agnese, S. Becker, S. Bounissou, O.-A. Adami, V. Reveret, J.-L. Sauvageot, L. Rodriguez

Proceedings Volume 10708, 107083O (2018) https://doi.org/10.1117/12.2313328

KEYWORDS: Bolometers, Silicon, Resistance, Sensors, Semiconducting wafers, Absorption, Polarization, Astronomy, Fabrication

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CEA has a long history of customizing optoelectronic components for space and astronomy applications. Based on this expertise, we are undertaking the development of cooled silicon bolometers for millimetre-wave (mm-wave) polarization detection in the next generation of space astronomy missions such as SPICA. Silicon bolometer technology has been demonstrated successfully in space conditions through the Herschel mission. There are many benefits of this technology such as the use of a simple and low-power read-out circuit that can be integrated below the detector array in an above-IC (Integrated Circuit) integration scheme. The advanced integration in a large array and the fabrication process based on microelectronics techniques are key challenges for these developments. This work presents the early results on the design, the fabrication and the first characterization of an innovative pixel for mm-wave polarization detection. The aim is to have an adapted absorption around λ=1.5 mm. These bolometers are composed of an absorbing layer and a thermometer, which are thermally insulated from the substrate. To increase the sensitivity, these detectors are working at very low temperature typically between 50 and 100 mK. The suspended thermometer is made of silicon implanted with Phosphorus and Boron species, and we optimized the design to have a high sensitivity with a 3D Variable Range Hopping conduction (Efros law) and a low 1/f noise at low temperature. The heat capacity of the bolometer is optimized by using a meander shape of the thermometer together with superconducting Ti/TiN thin films for the electromagnetic wave absorption. This sensor is implemented on a standard SOI substrate. Measurements of test structures at room temperature, and first results at very low temperature have been performed to evaluate the electrical performances of the fabricated detectors. The mechanical behaviour of released structures, including pixels with a pitch of 1200μm and 600μm, is presented and discussed.

Proceedings Article | 24 June 2014 Paper

Latest improvements in microbolometer thin film packaging: paving the way for low-cost consumer applications

J. Yon, G. Dumont, V. Goudon, S. Becker, A. Arnaud, S. Cortial, C. Tisse

Proceedings Volume 9070, 90701N (2014) https://doi.org/10.1117/12.2050378

KEYWORDS: Microbolometers, Packaging, Staring arrays, Semiconducting wafers, Bolometers, Infrared sensors, Thermography, Thin films, Infrared radiation, Electroluminescence

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Proceedings Article | 24 October 2012 Paper

Latest pixel size reduction of uncooled IR-FPA at CEA, LETI

Sebastien Becker, Pierre Imperinetti, Jean-Jacques Yon, Jean-Louis Ouvrier-Buffet, Valérie Goudon, Antoine Hamelin, Claire Vialle, Agnès Arnaud

Proceedings Volume 8541, 85410C (2012) https://doi.org/10.1117/12.974579

KEYWORDS: Microbolometers, Absorption, Staring arrays, Readout integrated circuits, Resistance, Amorphous silicon, Electro optics, Infrared detectors, Infrared radiation, Reflectivity

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Proceedings Article | 24 October 2012 Paper

320 x 240 uncooled IRFPA with pixel wise thin film vacuum packaging

J-J. Yon, G. Dumont, W. Rabaud, S. Becker, L. Carle, V. Goudon, C. Vialle, A. Hamelin, A. Arnaud

Proceedings Volume 8541, 85410D (2012) https://doi.org/10.1117/12.974846

KEYWORDS: Microbolometers, Packaging, Semiconducting wafers, Infrared radiation, Infrared sensors, Sensors, Bolometers, Resistance, Thin films, Staring arrays

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Proceedings Article | 31 May 2012 Paper

Current progress on pixel level packaging for uncooled IRFPA

G. Dumont, W. Rabaud, J.-J. Yon, L. Carle, V. Goudon, C. Vialle, Sébastien Becker, Antoine Hamelin, A. Arnaud

Proceedings Volume 8353, 83531I (2012) https://doi.org/10.1117/12.919918

KEYWORDS: Bolometers, Resistance, Packaging, Microbolometers, Semiconducting wafers, Imaging devices, Infrared imaging, Infrared sensors, Measurement devices, Thermography

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Proceedings Article | 15 January 2007 Paper

Laser-induced contamination of silica coatings in vacuum

S. Becker, A. Pereira, P. Bouchut, F. Geffraye, C. Anglade

Proceedings Volume 6403, 64030J (2007) https://doi.org/10.1117/12.696042

KEYWORDS: Molecules, Contamination, Silica, Absorption, Optical coatings, Chemical analysis, Thin film coatings, Adsorption, Raman spectroscopy, Molecular lasers

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Proceedings Article | 15 January 2007 Paper

Impact of organic contamination on 1064-nm laser-induced damage threshold of dielectric mirrors

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, G. Ravel

Proceedings Volume 6403, 64030I (2007) https://doi.org/10.1117/12.696037

KEYWORDS: Molecules, Mirrors, Contamination, Laser induced damage, Dielectric mirrors, Laser damage threshold, Optical components, Quartz, Laser irradiation, Hybrid fiber optics

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Proceedings Article | 7 February 2006 Paper

Accelerated low fluence laser ageing of AR coatings

S. Becker, A. Pereira, P. Bouchut, B. Andre, F. Geffraye, C Anglade

Proceedings Volume 5991, 59910M (2006) https://doi.org/10.1117/12.638246

KEYWORDS: Contamination, Antireflective coatings, Optical components, Spectroscopy, Interferometry, Microscopy, Absorption, Gas lasers, Carbon, Carbon monoxide

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Proceedings Article | 5 October 2005 Paper

Ageing of optical components under laser irradiation at 532nm

S. Becker, L. Delrive, P. Bouchut, B. Andre, F. Geffraye

Proceedings Volume 5963, 59631R (2005) https://doi.org/10.1117/12.624828

KEYWORDS: Contamination, Absorption, Optical components, Spectroscopy, Laser irradiation, Switching, Laser induced damage, Physics, Raman spectroscopy, Optical properties

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Showing 5 of 9 publications

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